发明授权
US07313769B1 Optimizing an integrated circuit layout by taking into consideration layout interactions as well as extra manufacturability margin 有权
通过考虑布局交互以及额外的可制造性边际来优化集成电路布局

Optimizing an integrated circuit layout by taking into consideration layout interactions as well as extra manufacturability margin
摘要:
A method of producing a layout representation corresponding to an integrated circuit (IC) device design can include generating an initial layout representation in accordance with a predetermined set of design rules and simulating how structures within the initial layout representation will pattern on a wafer. Based on the simulation, portions of the layout representation, which include structures demonstrating poor manufacturability and/or portions of the layout representation in which extra manufacturability margin is present, can be identified. Portions of the layout representation including structures demonstrating poor manufacturability and/or in which extra manufacturability margin is present can be modified to optimize the layout representation.
信息查询
0/0