发明授权
- 专利标题: High conductance cryopump for type III gas pumping
- 专利标题(中): 用于III型气体抽吸的高电导低温泵
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申请号: US10948955申请日: 2004-09-24
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公开(公告)号: US07313922B2公开(公告)日: 2008-01-01
- 发明人: Allen J. Bartlett , John Nordborg , Brian Thompson
- 申请人: Allen J. Bartlett , John Nordborg , Brian Thompson
- 申请人地址: US MA Chelmsford
- 专利权人: Brooks Automation, Inc.
- 当前专利权人: Brooks Automation, Inc.
- 当前专利权人地址: US MA Chelmsford
- 代理机构: Hamilton, Brook, Smith & Reynolds, P.C.
- 主分类号: B01D3/12
- IPC分类号: B01D3/12
摘要:
A cryopump provides for high pumping speed of Type III gases. An open configuration of a frontal array provides high conductance of gases into a radiation shield which is shaped to focus gases toward a second stage array. The second stage array has an open configuration of baffles coated with adsorbent. Substantially all of the adsorbent has a direct line of sight to the radiation shield or to the opening in the radiation shield, and substantially all of the baffles are coated with adsorbent. In one form, the second stage cryopump array comprises an array of discs fanned to define a generally ball shaped envelope.
公开/授权文献
- US20060064990A1 High conductance cryopump for type III gas pumping 公开/授权日:2006-03-30
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