发明授权
- 专利标题: Protect diodes for hybrid-orientation substrate structures
- 专利标题(中): 用于混合取向衬底结构的保护二极管
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申请号: US10908926申请日: 2005-06-01
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公开(公告)号: US07315066B2公开(公告)日: 2008-01-01
- 发明人: James W. Atkisson , Jeffrey P. Gambino , Alain Loiseau , Kirk D. Peterson
- 申请人: James W. Atkisson , Jeffrey P. Gambino , Alain Loiseau , Kirk D. Peterson
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Schmeiser, Olsen & Watts
- 代理商 William D. Sabo
- 主分类号: H01L23/62
- IPC分类号: H01L23/62
摘要:
A semiconductor structure and method for forming the same. The structure includes a hybrid orientation block having first and second silicon regions having different lattice orientations. The first silicon region is directly on the block, while the second silicon region is physically isolated from the block by a dielectric region. First and second transistors are formed on the first and second regions, respectively. Also, first and second doped discharge prevention structures are formed on the block wherein the first doped discharge prevention structure prevents discharge damage to the first transistor, whereas the second doped discharge prevention structure prevents discharge damage to the second transistor during a plasma process. During the normal operation of the first and second transistors, the first and second discharge prevention structures behave like dielectric regions.
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