发明授权
US07315161B2 Micro-electromechanical system (MEMS) based current and magnetic field sensor having capacitive sense components 有权
基于微机电系统(MEMS)的电流和磁场传感器具有电容感测元件

Micro-electromechanical system (MEMS) based current and magnetic field sensor having capacitive sense components
摘要:
A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.
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