发明授权
US07315161B2 Micro-electromechanical system (MEMS) based current and magnetic field sensor having capacitive sense components
有权
基于微机电系统(MEMS)的电流和磁场传感器具有电容感测元件
- 专利标题: Micro-electromechanical system (MEMS) based current and magnetic field sensor having capacitive sense components
- 专利标题(中): 基于微机电系统(MEMS)的电流和磁场传感器具有电容感测元件
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申请号: US11129682申请日: 2005-05-13
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公开(公告)号: US07315161B2公开(公告)日: 2008-01-01
- 发明人: Anis Zribi , Glenn Scott Claydon , Christopher James Kapusta , Laura Jean Meyer , Ertugrul Berkcan , Wei-Cheng Tian
- 申请人: Anis Zribi , Glenn Scott Claydon , Christopher James Kapusta , Laura Jean Meyer , Ertugrul Berkcan , Wei-Cheng Tian
- 申请人地址: US NY Niskayuna
- 专利权人: General Electric Company
- 当前专利权人: General Electric Company
- 当前专利权人地址: US NY Niskayuna
- 代理商 Jason K. Klindtworth; Jean K. Testa
- 主分类号: G01R33/00
- IPC分类号: G01R33/00
摘要:
A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.
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