公开(公告)号：US20100156577A1

公开(公告)日：2010-06-24

申请号：US12340776

申请日：2008-12-22

申请人： Xuefeng Wang ,  Kuna Venkat Satya Rama Kishore ,  Christopher Fred Keimel ,  Glenn Scott Claydon ,  Kanakasabapathi Subramanian

发明人： Xuefeng Wang ,  Kuna Venkat Satya Rama Kishore ,  Christopher Fred Keimel ,  Glenn Scott Claydon ,  Kanakasabapathi Subramanian

IPC分类号： H01H51/22

CPC分类号： H01H59/0009 ,  H01H1/0036

摘要： A micro electro-mechanical system switch is presented. The switch includes a base substrate having a support surface. An actuating surface having a notch and an electrical contact surface having an extension is provided. The extension is disposed within the notch. A beam is attached to the base substrate. The beam includes an actuatable free end that is configured to flex upon actuation and to make contact with at least a portion of the extension and carry current therethrough.

摘要翻译： 介绍了一种微机电系统开关。 开关包括具有支撑表面的基底。 提供具有凹口和具有延伸部的电接触表面的致动表面。 延伸部位于凹口内。 梁连接到基底基板。 梁包括可致动的自由端，其构造成在致动时弯曲并且与延伸部的至少一部分接触并且携带电流通过其中。

公开(公告)号：US20090159410A1

公开(公告)日：2009-06-25

申请号：US11961767

申请日：2007-12-20

申请人： Xuefeng Wang ,  Kanakasabapathi Subramanian ,  Christopher Fred Keimel ,  Marco Francesco Aimi ,  Kuna Venkat Satya Rama Kishore ,  Glenn Scott Claydon ,  Oliver Charles Boomhower ,  Parag Thakre

发明人： Xuefeng Wang ,  Kanakasabapathi Subramanian ,  Christopher Fred Keimel ,  Marco Francesco Aimi ,  Kuna Venkat Satya Rama Kishore ,  Glenn Scott Claydon ,  Oliver Charles Boomhower ,  Parag Thakre

IPC分类号： H01H57/00

CPC分类号： H01H59/0009 ,  H01H2059/0072

摘要： A MEMS switch includes a substrate, a movable actuator coupled to the substrate, a substrate contact, a substrate electrode, and a conductive stopper electrically coupled to the movable actuator and structured to prevent the movable actuator from contacting the substrate electrode while allowing the movable actuator to make contact with the substrate contact.

摘要翻译： MEMS开关包括衬底，耦合到衬底的可移动致动器，衬底接触件，衬底电极和电耦合到可移动致动器的导电阻塞件，并被构造成防止可动致动器接触衬底电极，同时允许可动致动器 与基板接触。

公开(公告)号：US07466121B2

公开(公告)日：2008-12-16

申请号：US11506493

申请日：2006-08-18

申请人： Ertugrul Berkcan ,  Christopher James Kapusta ,  Glenn Scott Claydon ,  Anis Zribi ,  Laura Jean Meyer ,  Wei-Cheng Tian

发明人： Ertugrul Berkcan ,  Christopher James Kapusta ,  Glenn Scott Claydon ,  Anis Zribi ,  Laura Jean Meyer ,  Wei-Cheng Tian

IPC分类号： G01R33/00

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

摘要翻译： 微机电系统（MEMS）电流传感器被描述为包括第一导体，用于使由第一导体中的电流产生的磁场成形的磁场成形部件，以及包括磁 - 用于感测成形磁场的MEMS组件，并且响应于此，提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法，包括使用在第一导体中的电流产生的磁场成形，用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测组件感测成形的磁场 并且提供第一导体中的电流的指示。

公开(公告)号：US20080122431A1

公开(公告)日：2008-05-29

申请号：US11733896

申请日：2007-04-11

申请人： ERTUGRUL BERKCAN ,  SHANKAR CHANDRASEKARAN ,  CHRISTOPHER JAMES KAPUSTA ,  LAURA JEAN MEYER ,  GLENN SCOTT CLAYDON ,  DEBBIE GAHATON JONES ,  ANIS ZRIBI

发明人： ERTUGRUL BERKCAN ,  SHANKAR CHANDRASEKARAN ,  CHRISTOPHER JAMES KAPUSTA ,  LAURA JEAN MEYER ,  GLENN SCOTT CLAYDON ,  DEBBIE GAHATON JONES ,  ANIS ZRIBI

IPC分类号： G01R19/00 ,  G01R33/02

CPC分类号： G01R15/207 ,  G01R15/148 ,  G01R33/0283 ,  G01R33/0286 ,  G01R35/005 ,  Y10T29/49002

摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component a structural component comprising a silicon substrate and a compliant layer comprising a material selected from the group consisting of silicon dioxide and silicon nitride, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field, and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.

摘要翻译： 基于微机电系统（MEMS）的电流和磁场传感器包括基于MEMS的磁场感测部件，包括硅衬底的结构部件和包括选自二氧化硅和氮化硅的材料的柔性层， 耦合到所述结构部件以提供所述磁场的机械指示的磁 - 机械转换器，以及耦合到所述结构部件以感测所述机械指示并且提供所述载流导体中的电流的指示的应变响应部件 回应。

公开(公告)号：US20080084565A1

公开(公告)日：2008-04-10

申请号：US11538885

申请日：2006-10-05

申请人： Anis Zribi ,  Min-Yi Shih ,  Guiju Song ,  Ajit Achuthan ,  Glenn Scott Claydon ,  Stacey Joy Kennerly ,  Kuna Venkat Satya Rama Kishore ,  Jianming Zheng ,  Kevin George Harding ,  Hua Xia

发明人： Anis Zribi ,  Min-Yi Shih ,  Guiju Song ,  Ajit Achuthan ,  Glenn Scott Claydon ,  Stacey Joy Kennerly ,  Kuna Venkat Satya Rama Kishore ,  Jianming Zheng ,  Kevin George Harding ,  Hua Xia

IPC分类号： G01B9/02

CPC分类号： G01D5/35303 ,  G01D5/268 ,  G01N17/008 ,  G01N21/45 ,  G01N21/8422 ,  G01N2021/458 ,  G01N2021/9546

摘要： A interferometer-based fouling detection system and method are described. The system may include a fiber optic cable, a light source in communication with the fiber optic cable, at least one photo detector in communication with the fiber optic cable, and at least one interferometric spectrometer. The fiber optic cable may include a long period grating and a fiber Bragg grating or it may include a facet edge. The system may instead include a fiber optic cable, a light source in communication with the fiber optic cable, at least one photo detector in communication with the fiber optic cable, a fiber coupler, a reference probe including a mirror, a sample probe, and an interferometer.

摘要翻译： 描述了基于干涉仪的结垢检测系统和方法。 该系统可以包括光纤电缆，与光纤电缆通信的光源，与光纤电缆通信的至少一个光电检测器，以及至少一个干涉光谱仪。 光纤电缆可以包括长周期光栅和光纤布拉格光栅，或者它可以包括小面边缘。 该系统可以替代地包括光纤电缆，与光纤电缆通信的光源，与光纤电缆通信的至少一个光电检测器，光纤耦合器，包括反射镜的参考探针，样本探针和 干涉仪。

公开(公告)号：US07293462B2

公开(公告)日：2007-11-13

申请号：US11028789

申请日：2005-01-04

申请人： Warren Lee ,  David Martin Mills ,  Glenn Scott Claydon ,  Kenneth Wayne Rigby ,  Wei-Cheng Tian ,  Ye-Ming Li ,  Jie Sun ,  Lowell Scott Smith ,  Stanley Chienwu Chu ,  Sam Yie-Sum Wong ,  Hyon-Jin Kwon

发明人： Warren Lee ,  David Martin Mills ,  Glenn Scott Claydon ,  Kenneth Wayne Rigby ,  Wei-Cheng Tian ,  Ye-Ming Li ,  Jie Sun ,  Lowell Scott Smith ,  Stanley Chienwu Chu ,  Sam Yie-Sum Wong ,  Hyon-Jin Kwon

IPC分类号： G01H11/00

CPC分类号： H04R23/00 ,  B06B1/0292

摘要： A device comprising an array of sensors and a multiplicity of bus lines, each sensor being electrically connected to a respective bus line and comprising a respective multiplicity of groups of micromachined sensor cells, the sensor cell groups of a particular sensor being electrically coupled to each other via the bus line to which that sensor is connected, each sensor cell group comprising a respective multiplicity of micromachined sensor cells that are electrically interconnected to each other and not switchably disconnectable from each other, the device further comprising means for isolating any one of the sensor cell groups from its associated bus line and in response to any one of the micromachined sensor cells of that sensor cell group being short-circuited to ground. In one implementation, the isolating means comprise a multiplicity of fuses. In another implementation, the isolating means comprise a multiplicity of short circuit protection modules, each module comprising a current sensor circuit and an electrical isolation switch.

摘要翻译： 一种包括传感器阵列和多条总线线路的设备，每个传感器电连接到相应的总线，并且包括相应多个微机械传感器单元组，特定传感器的传感器单元组彼此电耦合 通过连接该传感器的总线，每个传感器单元组包括彼此电互连并且不可切换地彼此分离的相应多个微机械传感器单元，该装置还包括用于隔离传感器 来自其相关联的总线线路的单元组以及响应于该传感器单元组的微机械传感器单元中的任一个被短路到地。 在一个实施方案中，隔离装置包括多个保险丝。 在另一实施方案中，隔离装置包括多个短路保护模块，每个模块包括电流传感器电路和电隔离开关。

公开(公告)号：US07741832B2

公开(公告)日：2010-06-22

申请号：US11736678

申请日：2007-04-18

申请人： Ertugrul Berkcan ,  Christopher James Kapusta ,  Marco Francesco Aimi ,  Shankar Chandrasekaran ,  Glenn Scott Claydon

发明人： Ertugrul Berkcan ,  Christopher James Kapusta ,  Marco Francesco Aimi ,  Shankar Chandrasekaran ,  Glenn Scott Claydon

IPC分类号： G01R33/00

CPC分类号： G01R15/207 ,  G01R15/148 ,  G01R33/0283 ,  G01R33/0286 ,  G01R35/005

摘要： A micro-electro-mechanical system (MEMS) current sensor for sensing a magnetic field produced by an electrical current flowing in a conductor includes a first fixed element and a moving element. The moving element is spaced away from the first fixed element and is movable relative to the fixed element responsive to a magnetic field produced by an electrical current flowing in a conductor for providing a mechanical indication of a strength of the magnetic field. The sensor also includes a tunneling current generator for generating a tunneling current between the first fixed element and the moving element and a tunneling current monitor for monitoring a change in the tunneling current responsive to the mechanical indication to provide an indication of a value of the electrical current in the conductor.

摘要翻译： 用于感测由在导体中流动的电流产生的磁场的微机电系统（MEMS）电流传感器包括第一固定元件和移动元件。 移动元件与第一固定元件间隔开，并且可响应于在导体中流动的电流产生的磁场相对于固定元件移动，以提供磁场强度的机械指示。 传感器还包括用于在第一固定元件和移动元件之间产生隧道电流的隧道电流发生器，以及隧道电流监视器，用于响应于机械指示监视隧道电流的变化，以提供电气值的指示 电流在导体中。

公开(公告)号：US20090096088A1

公开(公告)日：2009-04-16

申请号：US11872562

申请日：2007-10-15

申请人： MARCO FRANCESCO AIMI ,  Chirstopher James Kapusta ,  Arun Virupaksha Gowda ,  David Cecil Hays ,  Oliver Charles Boomhower ,  Glenn Scott Claydon ,  Joseph Alfred Iannotti ,  Christopher Fred Keimel

发明人： MARCO FRANCESCO AIMI ,  Chirstopher James Kapusta ,  Arun Virupaksha Gowda ,  David Cecil Hays ,  Oliver Charles Boomhower ,  Glenn Scott Claydon ,  Joseph Alfred Iannotti ,  Christopher Fred Keimel

IPC分类号： H01L23/34 ,  H01L21/00

CPC分类号： B81C1/00269 ,  B81C2203/0118 ,  B81C2203/019 ,  B81C2203/032 ,  H01L2224/16225 ,  H01L2924/1461 ,  H01L2924/00

摘要： Multiple microelectromechanical systems (MEMS) on a substrate are capped with a cover using a layer that may function as a bonding agent, separation layer, and hermetic seal. A substrate has a first side with multiple MEMS devices. A cover is formed with through-holes for vias, and with standoff posts for layer registration and separation. An adhesive sheet is patterned with cutouts for the MEMS devices, vias, and standoff posts. The adhesive sheet is tacked to the cover, then placed on the MEMS substrate and heated to bond the layers. The via holes may be metalized with leads for circuit board connection. The MEMS units may be diced from the substrate after sealing, thus protecting them from contaminants.

摘要翻译： 衬底上的多个微电子机械系统（MEMS）用盖子盖住，使用可用作粘合剂，分离层和气密密封的层。 衬底具有具有多个MEMS器件的第一侧。 形成有用于通孔的通孔的盖，并且具有用于层对准和分离的支柱。 图案化粘合片用于MEMS器件，通孔和支柱的切口。 将粘合片粘合到盖上，然后放置在MEMS基板上并加热以粘合层。 通孔可以用电路板连接的引线金属化。 在密封之后，MEMS单元可以从基底切割，从而保护它们免受污染。

公开(公告)号：US07411670B2

公开(公告)日：2008-08-12

申请号：US11400863

申请日：2006-04-10

申请人： Anis Zribi ,  Ayan Banerjee ,  Shivappa Ningappa Goravar ,  Shankar (nmn) Chandrasekaran ,  Sandip Maity ,  Glenn Scott Claydon ,  Stacey Joy Kennerly ,  Todd Ryan Tolliver ,  David Cecil Hays ,  Sheila Neumann Tandon ,  Long Que ,  Christopher Fred Keimel

发明人： Anis Zribi ,  Ayan Banerjee ,  Shivappa Ningappa Goravar ,  Shankar (nmn) Chandrasekaran ,  Sandip Maity ,  Glenn Scott Claydon ,  Stacey Joy Kennerly ,  Todd Ryan Tolliver ,  David Cecil Hays ,  Sheila Neumann Tandon ,  Long Que ,  Christopher Fred Keimel

IPC分类号： G01J3/44

CPC分类号： G01J3/44 ,  G01J3/02 ,  G01J3/0291 ,  G01N21/65

摘要： A photonic crystal based collection probe is provided. The probe includes a photonic crystal configured to guide and condition a beam of Raman scattered photons. Further, the device includes a spectrograph in optical communication with the photonic crystal and configured to receive Raman scattering from the photonic crystal. The device may be employed in a Raman spectrometer system.

摘要翻译： 提供了一种基于光子晶体的收集探针。 探针包括配置为引导和调节拉曼散射光子束的光子晶体。 此外，该装置包括与光子晶体光学通信并被配置为从光子晶体接收拉曼散射的光谱仪。 该装置可以用在拉曼光谱仪系统中。

公开(公告)号：US07327022B2

公开(公告)日：2008-02-05

申请号：US10248237

申请日：2002-12-30

申请人： Glenn Scott Claydon ,  Matthew Christian Nielsen ,  Samhita Dasgupta ,  Robert John Filkins ,  Glenn Alan Forman

发明人： Glenn Scott Claydon ,  Matthew Christian Nielsen ,  Samhita Dasgupta ,  Robert John Filkins ,  Glenn Alan Forman

IPC分类号： H01L23/48 ,  H01L23/52 ,  H01L29/40 ,  H01L23/29 ,  H01L23/02

CPC分类号： G02B6/4206 ,  G02B6/4214 ,  G02B6/43 ,  H01L24/19 ,  H01L24/20 ,  H01L2224/73267 ,  H01L2224/9222 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/12043 ,  H01L2924/14 ,  H01L2924/00

摘要： A novel micro optical system as a platform technology for electrical and optical interconnections, thermal and mechanical assembly and integration of electronic, optoelectronic, passive and active components. This platform provides optical coupling and chip-to-chip interconnection by microwave electrical, optical guided and unguided waves, and power or bias electrical contacts or interfaces by a novel chip in flexible circuit, rigid or inflexible embodiments.

摘要翻译： 一种新颖的微光学系统作为电气和光学互连的平台技术，电子，光电子，被动和有源组件的热和机械组装和集成。 该平台通过柔性电路，刚性或不灵活的实施例中的新型芯片提供了通过微波电，光引导和非导向波以及功率或偏置电触点或接口的光耦合和芯片到芯片互连。