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US07317469B2 Laser induced thermal imaging apparatus 有权
激光感应热成像仪

Laser induced thermal imaging apparatus
Abstract:
A laser induced thermal imaging apparatus for fabricating an organic light emitting display is provided. The laser induced thermal imaging apparatus includes a stage where a substrate is positioned; a transport device for transporting a donor substrate; a laminator for laminating the substrate to the donor substrate; a laser optical unit for performing the LITI, and a chamber supplied with an atmospheric pressure of an inert gas in which the stage, the laminator, and the laser optical unit are positioned.
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