Invention Grant
- Patent Title: Thermo-optical device
- Patent Title (中): 热光器件
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Application No.: US11333454Application Date: 2006-01-17
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Publication No.: US07319047B2Publication Date: 2008-01-15
- Inventor: Ruolin Li , Ut Tran
- Applicant: Ruolin Li , Ut Tran
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Trop, Pruner & Hu, P.C.
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
A polymer well may be formed over a thermal oxide formed over a semiconductor substrate in one embodiment. The well may include a waveguide and a pair of heaters adjacent the waveguide. Each heater may be mounted on a platform of insulating material to reduce heat loss through the substrate and the thermal oxide, in one embodiment.
Public/Granted literature
- US20060120680A1 Thermo-optical device Public/Granted day:2006-06-08
Information query
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