发明授权
- 专利标题: Semiconductor device using an interconnect
- 专利标题(中): 使用互连的半导体器件
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申请号: US10635892申请日: 2003-08-05
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公开(公告)号: US07320935B2公开(公告)日: 2008-01-22
- 发明人: Jihperng Leu , Christopher D. Thomas
- 申请人: Jihperng Leu , Christopher D. Thomas
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwegman, Lundberg & Woessner, P.A.
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
The present invention includes an embodiment that relates to method of forming an interconnect. The method includes the effect of reducing electromigration in a metallization. An article achieved by the inventive method includes a first interconnect disposed above a substrate; a first conductive diffusion barrier layer disposed above and on the first interconnect; an upper interconnect, that is either landed or unlanded and that is disposed above the first interconnect; and an upper conductive diffusion barrier layer disposed above and on the upper interconnect.
公开/授权文献
- US20040026786A1 Semiconductor device using an interconnect 公开/授权日:2004-02-12
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