发明授权
- 专利标题： Ultra-short wavelength x-ray system
- 专利标题（中）： 超短波长x射线系统
-
申请号： US10752604申请日： 2004-01-07
-
公开(公告)号： US07321604B2公开(公告)日： 2008-01-22
- 发明人: Donald Umstadter , Fei He , Yue-Ying Lau
- 申请人： Donald Umstadter , Fei He , Yue-Ying Lau
- 申请人地址： US MI Ann Arbor
- 专利权人： The Regents of the University of Michigan
- 当前专利权人： The Regents of the University of Michigan
- 当前专利权人地址： US MI Ann Arbor
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 主分类号： H01S3/00
- IPC分类号： H01S3/00 ; H01S3/09
摘要：
A method and apparatus to generate a beam of coherent light including x-rays or XUV by colliding a high-intensity laser pulse with an electron beam that is accelerated by a synchronized laser pulse. Applications include x-ray and EUV lithography, protein structural analysis, plasma diagnostics, x-ray diffraction, crack analysis, non-destructive testing, surface science and ultrafast science.
公开/授权文献
- US20050147147A1 Ultra-short wavelength x-ray system 公开/授权日：2005-07-07
信息查询
