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US07323142B2 Sensor substrate and method of fabricating same 有权
传感器基板及其制造方法

Sensor substrate and method of fabricating same
摘要:
A substrate with hermetically sealed vias extending from one side of the substrate to another and a method for fabricating same. The vias may be filled with a conductive material such as, for example, a fritless ink. The conductive path formed by the conductive material aids in sealing one side of the substrate from another. One side of the substrate may include a sensing element and another side of the substrate may include sensing electronics.
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