发明授权
US07326509B2 Composition for forming anti-reflective coating for use in lithography
有权
用于形成用于光刻的抗反射涂层的组合物
- 专利标题: Composition for forming anti-reflective coating for use in lithography
- 专利标题(中): 用于形成用于光刻的抗反射涂层的组合物
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申请号: US10486891申请日: 2002-08-13
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公开(公告)号: US07326509B2公开(公告)日: 2008-02-05
- 发明人: Shinya Arase , Takahiro Kishioka , Ken-ichi Mizusawa
- 申请人: Shinya Arase , Takahiro Kishioka , Ken-ichi Mizusawa
- 申请人地址: JP Tokyo
- 专利权人: Nissan Chemical Industries, Ltd.
- 当前专利权人: Nissan Chemical Industries, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff & Berridge PLC
- 优先权: JP2001-248878 20010820
- 国际申请: PCT/JP02/08244 WO 20020813
- 国际公布: WO03/017002 WO 20030227
- 主分类号: G03C1/00
- IPC分类号: G03C1/00 ; G03F7/26
摘要:
There is provided a composition for forming anti-reflective coating for use in a lithography which has a high effect of inhibiting reflected light, causes no intermixing with resist layers, affords excellent resist patterns, has a higher dry etching rate compared with the resist, and has broader margin of depth of focus and higher resolution than the prior compositions.Concretely, the composition is one for forming anti-reflective coating for use in a lithographic process in manufacture of a semiconductor device, and comprises a resin containing a lactone structure. The resin is one which a γ-lactone structure or a δ-lactone structure is introduced to a main chain thereof or a side chain bonded to the main chain.
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