Invention Grant
US07326589B2 Method for producing a TFA image sensor and one such TFA image sensor
有权
用于生产TFA图像传感器和一个这样的TFA图像传感器的方法
- Patent Title: Method for producing a TFA image sensor and one such TFA image sensor
- Patent Title (中): 用于生产TFA图像传感器和一个这样的TFA图像传感器的方法
-
Application No.: US11271492Application Date: 2005-11-11
-
Publication No.: US07326589B2Publication Date: 2008-02-05
- Inventor: Peter Rieve , Konstantin Seibel , Jens Prima , Markus Scholz , Tarek Lule , Stephan Benthien , Michael Sommer , Michael Wagner
- Applicant: Peter Rieve , Konstantin Seibel , Jens Prima , Markus Scholz , Tarek Lule , Stephan Benthien , Michael Sommer , Michael Wagner
- Applicant Address: NL Amsterdam
- Assignee: STMicroelectronics N.V.
- Current Assignee: STMicroelectronics N.V.
- Current Assignee Address: NL Amsterdam
- Agency: Wolf, Greenfield & Sacks, P.C
- Agent Lisa K. Jorgenson; James H. Morris
- Priority: DE101523254 20011026
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
The invention relates to a method for producing a TFA image sensor in which a multi-layer arrangement comprising a photo diode matrix is arranged on an ASIC switching circuit provided with electronic circuits for operating the TFA image sensor, such as pixel electronics, peripheral electronics and system electronics, for the pixel-wise conversion of electromagnetic radiation into an intensity-dependent photocurrent, the pixels being connected to contacts of the underlying pixel electronics of the ASIC switching circuit. The method enables conventionally produced ASIC switching circuits to be used without impairing the topography of the photoactive sensor surface. The CMOS passivation layer in the photoactive region and then the upper CMOS metallization are removed and replaced by a metallic layer which is structured in the pixel raster, for the formation of back electrodes. The photo diode matrix is then applied and structured, said photo diode matrix being embodied as a pixel matrix, on which a passivating protective layer and/or a color filter layer having a passivating action can be applied.
Public/Granted literature
- US20060102829A1 Method for producing a TFA image sensor and one such TFA image sensor Public/Granted day:2006-05-18
Information query
IPC分类: