Invention Grant
US07330272B2 Discrete quarter wave plates for displacement measuring interferometers
失效
用于位移测量干涉仪的离散四分之一波片
- Patent Title: Discrete quarter wave plates for displacement measuring interferometers
- Patent Title (中): 用于位移测量干涉仪的离散四分之一波片
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Application No.: US11119220Application Date: 2005-04-29
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Publication No.: US07330272B2Publication Date: 2008-02-12
- Inventor: Robert Todd Belt , Eric Stephen Johnstone
- Applicant: Robert Todd Belt , Eric Stephen Johnstone
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/02

Abstract:
At least two discrete quarter wave plates are provided for use as plane mirrors or reflectors in a displacement measuring interferometer, where the plates share common or substantially common reflecting surface geometries. A plurality of geometrically matched discrete matched quarter wave plates reduces the amount of tilt between an input beam provided to, and an output measurement beam provided by, an interferometer, resulting in increased interferometer dynamic range.
Public/Granted literature
- US20060244971A1 Discrete quarter wave plates for displacement measuring interferometers Public/Granted day:2006-11-02
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