发明授权
US07334473B2 Structures for supporting vibrators and devices for measuring physical quantities 有权
用于支撑振动器的结构和用于测量物理量的装置

Structures for supporting vibrators and devices for measuring physical quantities
摘要:
A structure for supporting a vibrator 1 is provided. The structure comprises a substrate 12 and bonding wires 14A, 14B fixed to the substrate 12 and connected with the vibrator 1. The vibrator 1 is supported with the bonding wires so that the vibrator 1 is not directly contacted with the substrate 12. “fd” and “fw” satisfy the following formula (1). “fd” represents a resonance frequency of a driving vibration mode of the vibrator and “fw” represents a characteristic frequency of a vibration mode of the bonding wire at room temperature. (fd/2)×1.05≦fw, or, fw≦(fd/2)×0.95.  (1)
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