发明授权
US07334473B2 Structures for supporting vibrators and devices for measuring physical quantities
有权
用于支撑振动器的结构和用于测量物理量的装置
- 专利标题: Structures for supporting vibrators and devices for measuring physical quantities
- 专利标题(中): 用于支撑振动器的结构和用于测量物理量的装置
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申请号: US11214455申请日: 2005-08-29
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公开(公告)号: US07334473B2公开(公告)日: 2008-02-26
- 发明人: Shigeki Hayashi , Takayuki Kikuchi , Yusuke Kinoshita
- 申请人: Shigeki Hayashi , Takayuki Kikuchi , Yusuke Kinoshita
- 申请人地址: JP Nagoya JP Shinjuku-Ku
- 专利权人: NGK Insulators, Ltd.,Seiko Epson Corporation
- 当前专利权人: NGK Insulators, Ltd.,Seiko Epson Corporation
- 当前专利权人地址: JP Nagoya JP Shinjuku-Ku
- 代理机构: Burr & Brown
- 优先权: JP2004-263310 20040910; JP2005-207047 20050715
- 主分类号: G01P9/04
- IPC分类号: G01P9/04
摘要:
A structure for supporting a vibrator 1 is provided. The structure comprises a substrate 12 and bonding wires 14A, 14B fixed to the substrate 12 and connected with the vibrator 1. The vibrator 1 is supported with the bonding wires so that the vibrator 1 is not directly contacted with the substrate 12. “fd” and “fw” satisfy the following formula (1). “fd” represents a resonance frequency of a driving vibration mode of the vibrator and “fw” represents a characteristic frequency of a vibration mode of the bonding wire at room temperature. (fd/2)×1.05≦fw, or, fw≦(fd/2)×0.95. (1)
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