- 专利标题: Method of monitoring pressure of a gas species and apparatus to do so
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申请号: US11152236申请日: 2005-06-15
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公开(公告)号: US07334482B2公开(公告)日: 2008-02-26
- 发明人: Martin Lehmann , Jean-Noel Fehr , Martin Liechti , Urban Schnell
- 申请人: Martin Lehmann , Jean-Noel Fehr , Martin Liechti , Urban Schnell
- 申请人地址: CH Wohlen AG
- 专利权人: Martin Lehmann
- 当前专利权人: Martin Lehmann
- 当前专利权人地址: CH Wohlen AG
- 代理机构: Antonelli, Terry, Stout & Kraus, LLP.
- 主分类号: G01L9/00
- IPC分类号: G01L9/00
摘要:
A method of monitoring pressure of a gas species up to at most a predetermined maximum pressure value is disclosed. The method includes exposing the gas species to transmission of laser light, periodically modulating the wavelength of the laser light over a wavelength band including at least one absorption line of the gas species, optoelectrically converting the transmitted laser light, thereby generating an electric output signal, performing at least one of first filtering the electric output signal with a filter characteristic having a lower cut-off frequency not lower than a transition frequency and of second filtering the electric output signal with a bandpass filter characteristic having an upper cut-off frequency not higher than the transition frequency and a lower cut-off frequency above the modulation frequency of the periodic wavelength modulation. The output of at least one of the filterings is evaluated as a pressure indicative signal.
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