Method of monitoring pressure of a gas species and apparatus to do so

    公开(公告)号:US07467554B2

    公开(公告)日:2008-12-23

    申请号:US11930544

    申请日:2007-10-31

    IPC分类号: G01L9/00

    摘要: A method of monitoring pressure of a gas species up to at most a predetermined maximum pressure value is disclosed. The method includes exposing the gas species to transmission of laser light, periodically modulating the wavelength of the laser light over a wavelength band including at least one absorption line of the gas species, optoelectrically converting the transmitted laser light, thereby generating an electric output signal, performing at least one of first filtering the electric output signal with a filter characteristic having a lower cut-off frequency not lower than a transition frequency and of second filtering the electric output signal with a bandpass filter characteristic having an upper cut-off frequency not higher than the transition frequency and a lower cut-off frequency above the modulation frequency of the periodic wavelength modulation. The output of at least one of the filterings is evaluated as a pressure indicative signal.

    Method of monitoring pressure of a gas species and apparatus to do so
    2.
    发明申请
    Method of monitoring pressure of a gas species and apparatus to do so 失效
    监测气体种类和装置的压力的方法

    公开(公告)号:US20070144265A1

    公开(公告)日:2007-06-28

    申请号:US11707090

    申请日:2007-02-16

    IPC分类号: G01L9/00

    摘要: A method of monitoring pressure of a gas species up to at most a predetermined maximum pressure value is disclosed. The method includes exposing the gas species to transmission of laser light, periodically modulating the wavelength of the laser light over a wavelength band including at least one absorption line of the gas species, optoelectrically converting the transmitted laser light, thereby generating an electric output signal, performing at least one of first filtering the electric output signal with a filter characteristic having a lower cut-off frequency not lower than a transition frequency and of second filtering the electric output signal with a bandpass filter characteristic having an upper cut-off frequency not higher than the transition frequency and a lower cut-off frequency above the modulation frequency of the periodic wavelength modulation. The output of at least one of the filterings is evaluated as a pressure indicative signal.

    摘要翻译: 公开了一种监测气体种类的压力至多达到预定最大压力值的方法。 该方法包括将气体物质暴露于透射激光,周期性地调制激光的波长在包括气体种类的至少一个吸收线的波长带上,光电转换透射的激光,从而产生电输出信号, 执行以具有不低于转换频率的较低截止频率的滤波器特性对所述电输出信号进行第一滤波中的至少一个,并且以具有不高于上限截止频率的带通滤波器特性对所述电输出信号进行第二滤波 超过转换频率和低于周期性波长调制调制频率的较低截止频率。 至少一个过滤器的输出被评估为压力指示信号。

    METHOD OF MONITORING PRESSURE OF A GAS SPECIES AND APPARATUS TO DO SO
    3.
    发明申请
    METHOD OF MONITORING PRESSURE OF A GAS SPECIES AND APPARATUS TO DO SO 失效
    监测气体物质和装置的压力的方法

    公开(公告)号:US20080054532A1

    公开(公告)日:2008-03-06

    申请号:US11930544

    申请日:2007-10-31

    IPC分类号: B29C44/60

    摘要: A method of monitoring pressure of a gas species up to at most a predetermined maximum pressure value is disclosed. The method includes exposing the gas species to transmission of laser light, periodically modulating the wavelength of the laser light over a wavelength band including at least one absorption line of the gas species, optoelectrically converting the transmitted laser light, thereby generating an electric output signal, performing at least one of first filtering the electric output signal with a filter characteristic having a lower cut-off frequency not lower than a transition frequency and of second filtering the electric output signal with a bandpass filter characteristic having an upper cut-off frequency not higher than the transition frequency and a lower cut-off frequency above the modulation frequency of the periodic wavelength modulation. The output of at least one of the filterings is evaluated as a pressure indicative signal.

    摘要翻译: 公开了一种监测气体种类的压力至多达到预定最大压力值的方法。 该方法包括将气体物质暴露于透射激光,周期性地调制激光的波长在包括气体种类的至少一个吸收线的波长带上,光电转换透射的激光,从而产生电输出信号, 执行以具有不低于转换频率的较低截止频率的滤波器特性对所述电输出信号进行第一滤波中的至少一个,并且以具有不高于上限截止频率的带通滤波器特性对所述电输出信号进行第二滤波 超过转换频率和低于周期性波长调制调制频率的较低截止频率。 至少一个过滤器的输出被评估为压力指示信号。

    Method of monitoring pressure of a gas species and apparatus to do so
    4.
    发明授权
    Method of monitoring pressure of a gas species and apparatus to do so 失效
    监测气体种类和装置的压力的方法

    公开(公告)号:US07382819B2

    公开(公告)日:2008-06-03

    申请号:US11707090

    申请日:2007-02-16

    IPC分类号: G01L7/00

    摘要: A method of monitoring pressure of a gas species up to at most a predetermined maximum pressure value is disclosed. The method includes exposing the gas species to transmission of laser light, periodically modulating the wavelength of the laser light over a wavelength band including at least one absorption line of the gas species, optoelectrically converting the transmitted laser light, thereby generating an electric output signal, performing at least one of first filtering the electric output signal with a filter characteristic having a lower cut-off frequency not lower than a transition frequency and of second filtering the electric output signal with a bandpass filter characteristic having an upper cut-off frequency not higher than the transition frequency and a lower cut-off frequency above the modulation frequency of the periodic wavelength modulation. The output of at least one of the filterings is evaluated as a pressure indicative signal.

    摘要翻译: 公开了一种监测气体种类的压力至多达到预定最大压力值的方法。 该方法包括将气体物质暴露于透射激光,周期性地调制激光的波长在包括气体种类的至少一个吸收线的波长带上,光电转换透射的激光,从而产生电输出信号, 执行以具有不低于转换频率的较低截止频率的滤波器特性对所述电输出信号进行第一滤波中的至少一个,并且以具有不高于上限截止频率的带通滤波器特性对所述电输出信号进行第二滤波 超过转换频率和低于周期性波长调制调制频率的较低截止频率。 至少一个过滤器的输出被评估为压力指示信号。

    METHOD OF MONITORING PRESSURE OF A GAS SPECIES AND APPARATUS TO DO SO
    5.
    发明申请
    METHOD OF MONITORING PRESSURE OF A GAS SPECIES AND APPARATUS TO DO SO 失效
    监测气体物质和装置的压力的方法

    公开(公告)号:US20090044629A1

    公开(公告)日:2009-02-19

    申请号:US12256867

    申请日:2008-10-23

    IPC分类号: G01L9/00 G01B11/00

    摘要: A method of monitoring pressure of a gas species up to at most a predetermined maximum pressure value is disclosed. The method includes exposing the gas species to transmission of laser light, periodically modulating the wavelength of the laser light over a wavelength band including at least one absorption line of the gas species, optoelectrically converting the transmitted laser light, thereby generating an electric output signal, performing at least one of first filtering the electric output signal with a filter characteristic having a lower cut-off frequency not lower than a transition frequency and of second filtering the electric output signal with a bandpass filter characteristic having an upper cut-off frequency not higher than the transition frequency and a lower cut-off frequency above the modulation frequency of the periodic wavelength modulation. The output of at least one of the filterings is evaluated as a pressure indicative signal.

    摘要翻译: 公开了一种监测气体种类的压力至多达到预定最大压力值的方法。 该方法包括将气体物质暴露于透射激光,周期性地调制激光的波长在包括气体种类的至少一个吸收线的波长带上,光电转换透射的激光,从而产生电输出信号, 执行以具有不低于转换频率的较低截止频率的滤波器特性对所述电输出信号进行第一滤波中的至少一个,并且以具有不高于上限截止频率的带通滤波器特性对所述电输出信号进行第二滤波 超过转换频率和低于周期性波长调制调制频率的较低截止频率。 至少一个过滤器的输出被评估为压力指示信号。

    Method of monitoring pressure of a gas species and apparatus to do so

    公开(公告)号:US20060021441A1

    公开(公告)日:2006-02-02

    申请号:US11152236

    申请日:2005-06-15

    IPC分类号: G01L9/00 G01N21/00

    摘要: A method of monitoring pressure of a gas species up to at most a predetermined maximum pressure value is disclosed. The method includes exposing the gas species to transmission of laser light, periodically modulating the wavelength of the laser light over a wavelength band including at least one absorption line of the gas species, optoelectrically converting the transmitted laser light, thereby generating an electric output signal, performing at least one of first filtering the electric output signal with a filter characteristic having a lower cut-off frequency not lower than a transition frequency and of second filtering the electric output signal with a bandpass filter characteristic having an upper cut-off frequency not higher than the transition frequency and a lower cut-off frequency above the modulation frequency of the periodic wavelength modulation. The output of at least one of the filterings is evaluated as a pressure indicative signal.

    Method of monitoring pressure of a gas species and apparatus to do so
    7.
    发明申请
    Method of monitoring pressure of a gas species and apparatus to do so 失效
    监测气体种类和装置的压力的方法

    公开(公告)号:US20050022603A1

    公开(公告)日:2005-02-03

    申请号:US10894309

    申请日:2004-07-20

    摘要: A method of monitoring pressure of a gas species up to at most a predetermined maximum pressure value is disclosed. The method includes exposing the gas species to transmission of laser light, periodically modulating the wavelength of the laser light over a wavelength band including at least one absorption line of the gas species, optoelectrically converting the transmitted laser light, thereby generating an electric output signal, performing at least one of first filtering the electric output signal with a filter characteristic having a lower cut-off frequency not lower than a transition frequency and of second filtering the electric output signal with a bandpass filter characteristic having an upper cut-off frequency not higher than the transition frequency and a lower cut-off frequency above the modulation frequency of the periodic wavelength modulation. The output of at least one of the filterings is evaluated as a pressure indicative signal.

    摘要翻译: 公开了一种监测气体种类的压力至多达到预定最大压力值的方法。 该方法包括将气体物质暴露于透射激光,周期性地调制激光的波长在包括气体种类的至少一个吸收线的波长带上,光电转换透射的激光,从而产生电输出信号, 执行以具有不低于转换频率的较低截止频率的滤波器特性对所述电输出信号进行第一滤波中的至少一个,并且以具有不高于上限截止频率的带通滤波器特性对所述电输出信号进行第二滤波 超过转换频率和低于周期性波长调制调制频率的较低截止频率。 至少一个过滤器的输出被评估为压力指示信号。

    METHOD OF MONITORING PRESSURE OF A GAS SPECIES AND APPARATUS TO DO SO
    8.
    发明申请
    METHOD OF MONITORING PRESSURE OF A GAS SPECIES AND APPARATUS TO DO SO 审中-公开
    监测气体物质和装置的压力的方法

    公开(公告)号:US20100005893A1

    公开(公告)日:2010-01-14

    申请号:US12565262

    申请日:2009-09-23

    IPC分类号: G01N21/61

    摘要: A method of monitoring pressure of a gas species up to at most a predetermined maximum pressure value is disclosed. The method includes exposing the gas species to transmission of laser light, periodically modulating the wavelength of the laser light over a wavelength band including at least one absorption line of the gas species, optoelectrically converting the transmitted laser light, thereby generating an electric output signal, performing at least one of first filtering the electric output signal with a filter characteristic having a lower cut-off frequency not lower than a transition frequency and of second filtering the electric output signal with a bandpass filter characteristic having an upper cut-off frequency not higher than the transition frequency and a lower cut-off frequency above the modulation frequency of the periodic wavelength modulation. The output of at least one of the filterings is evaluated as a pressure indicative signal.

    摘要翻译: 公开了一种监测气体种类的压力至多达到预定最大压力值的方法。 该方法包括将气体物质暴露于透射激光,周期性地调制激光的波长在包括气体种类的至少一个吸收线的波长带上,光电转换透射的激光,从而产生电输出信号, 执行以具有不低于转换频率的较低截止频率的滤波器特性对所述电输出信号进行第一滤波中的至少一个,并且以具有不高于上限截止频率的带通滤波器特性对所述电输出信号进行第二滤波 超过转换频率和低于周期性波长调制调制频率的较低截止频率。 至少一个过滤器的输出被评估为压力指示信号。

    Method of monitoring pressure of a gas species and apparatus to do so
    9.
    发明授权
    Method of monitoring pressure of a gas species and apparatus to do so 失效
    监测气体种类和装置的压力的方法

    公开(公告)号:US07600431B2

    公开(公告)日:2009-10-13

    申请号:US12256867

    申请日:2008-10-23

    IPC分类号: G01N21/61

    摘要: A method of monitoring pressure of a gas species up to at most a predetermined maximum pressure value is disclosed. The method includes exposing the gas species to transmission of laser light, periodically modulating the wavelength of the laser light over a wavelength band including at least one absorption line of the gas species, optoelectrically converting the transmitted laser light, thereby generating an electric output signal, performing at least one of first filtering the electric output signal with a filter characteristic having a lower cut-off frequency not lower than a transition frequency and of second filtering the electric output signal with a bandpass filter characteristic having an upper cut-off frequency not higher than the transition frequency and a lower cut-off frequency above the modulation frequency of the periodic wavelength modulation. The output of at least one of the filterings is evaluated as a pressure indicative signal.

    摘要翻译: 公开了一种监测气体种类的压力至多达到预定最大压力值的方法。 该方法包括将气体物质暴露于透射激光,周期性地调制激光的波长在包括气体种类的至少一个吸收线的波长带上,光电转换透射的激光,从而产生电输出信号, 执行以具有不低于转换频率的较低截止频率的滤波器特性对所述电输出信号进行第一滤波中的至少一个,并且以具有不高于上限截止频率的带通滤波器特性对所述电输出信号进行第二滤波 超过转换频率和低于周期性波长调制调制频率的较低截止频率。 至少一个过滤器的输出被评估为压力指示信号。

    Method of monitoring pressure of a gas species and apparatus to do so

    公开(公告)号:US07334482B2

    公开(公告)日:2008-02-26

    申请号:US11152236

    申请日:2005-06-15

    IPC分类号: G01L9/00

    摘要: A method of monitoring pressure of a gas species up to at most a predetermined maximum pressure value is disclosed. The method includes exposing the gas species to transmission of laser light, periodically modulating the wavelength of the laser light over a wavelength band including at least one absorption line of the gas species, optoelectrically converting the transmitted laser light, thereby generating an electric output signal, performing at least one of first filtering the electric output signal with a filter characteristic having a lower cut-off frequency not lower than a transition frequency and of second filtering the electric output signal with a bandpass filter characteristic having an upper cut-off frequency not higher than the transition frequency and a lower cut-off frequency above the modulation frequency of the periodic wavelength modulation. The output of at least one of the filterings is evaluated as a pressure indicative signal.