Invention Grant
- Patent Title: High current density particle beam system
- Patent Title (中): 高电流密度粒子束系统
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Application No.: US11274608Application Date: 2005-11-15
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Publication No.: US07335894B2Publication Date: 2008-02-26
- Inventor: Juergen Frosien , Stefan Lanio , Gerald Schoenecker , Alan D. Brodie , David A. Crewe
- Applicant: Juergen Frosien , Stefan Lanio , Gerald Schoenecker , Alan D. Brodie , David A. Crewe
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesselschaft
- Current Assignee: ICT Integrated Circuit Testing Gesselschaft
- Current Assignee Address: DE Heimstetten
- Agency: Patterson & Sheridan L.L.P.
- Priority: EP04027115 20041115
- Main IPC: H01J37/244
- IPC: H01J37/244
Abstract:
The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.
Public/Granted literature
- US20060151711A1 High current density particle beam system Public/Granted day:2006-07-13
Information query
