- 专利标题: Systems and methods for controlling of electro-migration
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申请号: US11140765申请日: 2005-05-31
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公开(公告)号: US07339390B2公开(公告)日: 2008-03-04
- 发明人: Hayden Clavie Cranford, Jr. , Louis Lu-Chen Hsu , James Stephen Mason , Chih-Chao Yang
- 申请人: Hayden Clavie Cranford, Jr. , Louis Lu-Chen Hsu , James Stephen Mason , Chih-Chao Yang
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Schubert Osterrieder & Nickelson PLLC
- 代理商 Joscelyn G. Cockburn
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
Systems and methods for controlling electro-migration, and reducing the deleterious effects thereof, are disclosed. Embodiments provide for reversal of an applied voltage to an integrated circuit when a measurement indicative of an extent of electro-migration indicates that a healing cycle of operation is warranted. During the healing cycle, circuits of the integrated circuit function normally, but electro-migration effects are reversed. In one embodiment, micro-electro-mechanical switches are provided at a lowest level of metallization to switch the direction of current through the levels of metallization of the integrated circuit. In another embodiment, if the measurement indicative of the extent of electro-migration exceeds a reference level by a specifiable amount, then the voltage applied to the integrated circuit is reversed in polarity to cause current to switch directions to counter electro-migration. A plurality of switches are provided to switch current directions through a lowest level of metallization so that the circuits function normally even though the polarity of the applied voltage has been reversed.
公开/授权文献
- US20060267616A1 Systems and methods for controlling of electro-migration 公开/授权日:2006-11-30
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