Invention Grant
- Patent Title: System for a pellicle frame with heightened bonding surfaces
- Patent Title (中): 防护薄膜组件系统,具有更高的粘结面
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Application No.: US11671647Application Date: 2007-02-06
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Publication No.: US07339653B2Publication Date: 2008-03-04
- Inventor: Joseph Laganza , Jorge Ivaldi
- Applicant: Joseph Laganza , Jorge Ivaldi
- Applicant Address: NL Veldhoven
- Assignee: ASML Holding N.V.
- Current Assignee: ASML Holding N.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox PLLC
- Main IPC: G03B27/62
- IPC: G03B27/62 ; G03B27/32 ; G03B27/58

Abstract:
A method and apparatus for maintaining an optical gap between optical structures in a photolithography system is described. A frame defines first and second opposing surfaces. The first opposing surface defines a first opening and the second opposing surface defines a second opening. A plurality of spacing members are spaced apart on the first opposing surface around the first opening. The spacing members have substantially co-planar surfaces configured to mate with a surface of a first optical structure. A bonding agent seals a space around the first opening between the first opposing surface and the first optical structure. The frame thereby encloses the optical gap between the first optical structure and a second optical structure.
Public/Granted literature
- US20070127000A1 Method and System for a Pellicle Frame with Heightened Bonding Surfaces Public/Granted day:2007-06-07
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