- 专利标题: Thin film transistor, liquid crystal display apparatus, manufacturing method of thin film transistor, and manufacturing method of liquid crystal display apparatus
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申请号: US10524465申请日: 2003-07-23
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公开(公告)号: US07342288B2公开(公告)日: 2008-03-11
- 发明人: Akiyoshi Fujii , Takaya Nakabayashi
- 申请人: Akiyoshi Fujii , Takaya Nakabayashi
- 申请人地址: JP Osaka
- 专利权人: Sharp Kabushiki Kaisha
- 当前专利权人: Sharp Kabushiki Kaisha
- 当前专利权人地址: JP Osaka
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2002-255568 20020830
- 国际申请: PCT/JP03/09361 WO 20030723
- 国际公布: WO2004/023561 WO 20040318
- 主分类号: H01L29/417
- IPC分类号: H01L29/417
摘要:
A manufacturing method of a thin film transistor of the present invention includes the steps of (i) forming an electrode formation area in which a source electrode and a drain electrode are formed by applying a droplet of an electrode raw material, (ii) applying the droplet of the electrode raw material on drop-on positions located off a forming area of a semiconductor layer and in the electrode formation area, and (iii) forming the source electrode and the drain electrode in the electrode formation area. With this arrangement, it is possible to surely prevent adherence of a splash droplet on a channel section between each electrode, in forming the source electrode and the drain electrode by applying the droplet of the electrode raw material.
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