发明授权
US07343271B2 Incorporation of a phase map into fast model-based optical proximity correction simulation kernels to account for near and mid-range flare
有权
将相位图并入基于快速模型的光学邻近校正模拟内核,以解决近距离和中等范围的闪光
- 专利标题: Incorporation of a phase map into fast model-based optical proximity correction simulation kernels to account for near and mid-range flare
- 专利标题(中): 将相位图并入基于快速模型的光学邻近校正模拟内核,以解决近距离和中等范围的闪光
-
申请号: US10694465申请日: 2003-10-27
-
公开(公告)号: US07343271B2公开(公告)日: 2008-03-11
- 发明人: Gregg M. Gallatin , Emanuel Gofman , Kafai Lai , Mark A. Lavin , Maharaj Mukherjee , Dov Ramm , Alan E. Rosenbluth , Shlomo Shlafman
- 申请人: Gregg M. Gallatin , Emanuel Gofman , Kafai Lai , Mark A. Lavin , Maharaj Mukherjee , Dov Ramm , Alan E. Rosenbluth , Shlomo Shlafman
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: DeLio & Peterson, LLC
- 代理商 Robert Curcio; Steven Capella
- 主分类号: G06F7/60
- IPC分类号: G06F7/60 ; G06F17/50 ; G06F19/00 ; G06K9/00
摘要:
A first method to compute a phase map within an optical proximity correction simulation kernel utilizes simulated wavefront information from randomly generated data. A second method uses measured data from optical tools. A phase map is created by analytically embedding a randomly generated two-dimensional array of complex numbers of wavefront information, and performing an inverse Fourier Transform on the resultant array. A filtering function requires the amplitude of each element of the array to be multiplied by a Gaussian function. A power law is then applied to the array. The elements of the array are shuffled, and converted from the phasor form to real/imaginary form. A two-dimensional Fast Fourier Transform is applied. The array is then unshuffled, and converted back to phasor form.
公开/授权文献
信息查询