发明授权
- 专利标题: Method of manufacturing a piezoelectric element and a liquid ink jet head
- 专利标题(中): 制造压电元件和液体喷墨头的方法
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申请号: US11040090申请日: 2005-01-24
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公开(公告)号: US07343654B2公开(公告)日: 2008-03-18
- 发明人: Li Xin-Shan
- 申请人: Li Xin-Shan
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2004-016256 20040123; JP2005-004356 20050111
- 主分类号: H04R17/00
- IPC分类号: H04R17/00 ; H05K3/02
摘要:
Provided are a piezoelectric element, a method of manufacturing the same, and a liquid jet head, which can improve, and homogenize, characteristics of a piezoelectric layer. Included are: a step of forming a seed titanium layer interposed therebetween, the seed titanium layer being formed at a desired film thickness by applying by titanium (Ti), at least twice; and a step of forming a piezoelectric precursor film by applying a piezoelectric material on the seed titanium layer, thereafter crystallizing the piezoelectric precursor film by baking, and thereby forming the piezoelectric layer.
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