发明授权
US07343654B2 Method of manufacturing a piezoelectric element and a liquid ink jet head 失效
制造压电元件和液体喷墨头的方法

  • 专利标题: Method of manufacturing a piezoelectric element and a liquid ink jet head
  • 专利标题(中): 制造压电元件和液体喷墨头的方法
  • 申请号: US11040090
    申请日: 2005-01-24
  • 公开(公告)号: US07343654B2
    公开(公告)日: 2008-03-18
  • 发明人: Li Xin-Shan
  • 申请人: Li Xin-Shan
  • 申请人地址: JP Tokyo
  • 专利权人: Seiko Epson Corporation
  • 当前专利权人: Seiko Epson Corporation
  • 当前专利权人地址: JP Tokyo
  • 代理机构: Sughrue Mion, PLLC
  • 优先权: JP2004-016256 20040123; JP2005-004356 20050111
  • 主分类号: H04R17/00
  • IPC分类号: H04R17/00 H05K3/02
Method of manufacturing a piezoelectric element and a liquid ink jet head
摘要:
Provided are a piezoelectric element, a method of manufacturing the same, and a liquid jet head, which can improve, and homogenize, characteristics of a piezoelectric layer. Included are: a step of forming a seed titanium layer interposed therebetween, the seed titanium layer being formed at a desired film thickness by applying by titanium (Ti), at least twice; and a step of forming a piezoelectric precursor film by applying a piezoelectric material on the seed titanium layer, thereafter crystallizing the piezoelectric precursor film by baking, and thereby forming the piezoelectric layer.
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