发明授权
- 专利标题： Piezoelectric thin-film resonator and filter using the same
- 专利标题（中）： 压电薄膜谐振器和使用其的滤波器
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申请号： US11326418申请日： 2006-01-06
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公开(公告)号： US07345402B2公开(公告)日： 2008-03-18
- 发明人: Shinji Taniguchi , Tsuyoshi Yokoyama , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
- 申请人： Shinji Taniguchi , Tsuyoshi Yokoyama , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
- 申请人地址： JP Yokohama JP Kawasaki
- 专利权人： Fujitsu-Media Devices Limited,Fujitsu Limited
- 当前专利权人： Fujitsu-Media Devices Limited,Fujitsu Limited
- 当前专利权人地址： JP Yokohama JP Kawasaki
- 代理机构： Arent Fox LLP
- 优先权： JP2005-005791 20050112
- 主分类号： H03H9/15
- IPC分类号： H03H9/15 ; H01L41/04
摘要：
A piezoelectric thin-film resonator includes a film laminate formed on a device substrate, the film laminate including a lower electrode, a piezoelectric film provided on the device substrate and the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the upper and lower electrodes has an electrode leading portion that extends from an membrane in which the upper electrode overlaps with the lower electrode through the piezoelectric film and has a width narrower than that of the membrane.
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