A deformable mirror, in which the distance between an electrode substrate and a membrane can be accurately maintained and which can be produced at a low material cost, is provided. The deformable mirror comprises: an electrode substrate 11 having a plurality of electrodes (16a, 16b, 16c, 16d and 16e) formed on a surface of the electrode substrate; a silicon membrane 13 having a counter electrode opposed to the plurality of electrodes formed on the electrode substrate 11; a reflection section 15 provided on the side of the silicon membrane 13 opposite the counter electrode; and a support plate 19 integrally bonded to the electrode substrate 11 for restraining the displacements of the plurality of electrodes which adversely affect the deformation of the silicon membrane 13, in which a plurality of layers of wiring patterns (11a, 11b, 11c, 11d and 11e) for supplying drive voltages to the plurality of electrodes are formed in the electrode substrate 11.