Invention Grant
US07345856B2 Method and apparatus for arc suppression in scanned ion beam processing equipment 有权
扫描离子束处理设备中电弧抑制的方法和装置

  • Patent Title: Method and apparatus for arc suppression in scanned ion beam processing equipment
  • Patent Title (中): 扫描离子束处理设备中电弧抑制的方法和装置
  • Application No.: US11259549
    Application Date: 2005-10-25
  • Publication No.: US07345856B2
    Publication Date: 2008-03-18
  • Inventor: Kenneth P. Regan
  • Applicant: Kenneth P. Regan
  • Applicant Address: US MA Billerica
  • Assignee: TEL Epion Inc.
  • Current Assignee: TEL Epion Inc.
  • Current Assignee Address: US MA Billerica
  • Agency: Burns & Levinson LLP
  • Agent Jerry Cohen; David W. Gomes
  • Main IPC: H02H3/00
  • IPC: H02H3/00 H02H7/00
Method and apparatus for arc suppression in scanned ion beam processing equipment
Abstract:
In an ion bean acceleration system, transient electrical arc suppression and ion beam accelerator biasing circuitry. Two-terminal circuitry, connectable in series, for suppressing arcs by automatically sensing arc conditions and switch from at least a first operating state providing a relatively low resistance electrical pathway for current between source and load terminals to at least a second, relatively high resistance electrical pathway. Selection of circuit component characteristics permits controlling the delay in returning from the second state to the first state after the arc has been suppressed.
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