Invention Grant
US07346431B2 Substrate carrier handler that unloads substrate carriers directly from a moving conveyer
有权
基板载体处理器，可直接从移动的输送机卸载基板载体
- Patent Title: Substrate carrier handler that unloads substrate carriers directly from a moving conveyer
- Patent Title (中): 基板载体处理器，可直接从移动的输送机卸载基板载体
-
Application No.: US11555240Application Date: 2006-10-31
-
Publication No.: US07346431B2Publication Date: 2008-03-18
- Inventor: Michael Robert Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric Andrew Englhardt
- Applicant: Michael Robert Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric Andrew Englhardt
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: G06F19/00
- IPC: G06F19/00
Abstract:
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.
Public/Granted literature
- US20070061042A1 SUBSTRATE CARRIER HANDLER THAT UNLOADS SUBSTRATE CARRIERS DIRECTLY FROM A MOVING CONVEYOR Public/Granted day:2007-03-15
Information query
