Invention Grant
- Patent Title: Heavy-load nanopositioner with dual-parallel flexure design
- Patent Title (中): 具有双平行弯曲设计的重载纳米定位器
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Application No.: US11107008Application Date: 2005-04-15
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Publication No.: US07348709B2Publication Date: 2008-03-25
- Inventor: Ying Xu
- Applicant: Ying Xu
- Applicant Address: US WI Madison
- Assignee: nPoint, Inc.
- Current Assignee: nPoint, Inc.
- Current Assignee Address: US WI Madison
- Agency: DeWitt Ross & Stevens S.C.
- Agent Joseph T. Leone, Esq.
- Main IPC: H01L41/08
- IPC: H01L41/08
Abstract:
A positioning device for heavy loads is provided. The positioning device includes a frame and a stage disposed or integrally defined within the frame. The stage is dimensioned and configured to be translatable within the frame in at least one axis of motion. At least one dual-parallel flexure connects the stage to the frame.
Public/Granted literature
- US20050231075A1 Heavy-load nanopositioner with dual-parallel flexure design Public/Granted day:2005-10-20
Information query
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