Invention Grant
- Patent Title: Probing card and inspection apparatus for microstructure
- Patent Title (中): 探测卡和检查装置的微观结构
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Application No.: US11393953Application Date: 2006-03-31
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Publication No.: US07348788B2Publication Date: 2008-03-25
- Inventor: Masami Yakabe , Naoki Ikeuchi
- Applicant: Masami Yakabe , Naoki Ikeuchi
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2005-102760 20050331; JP2005-266720 20050914; JP2006-093448 20060330
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
A probing card and an inspection apparatus which precisely inspect a microstructure having a minute moving section by a simple method are provided. A probing card (6) has a speaker (2), and a circuit substrate (100) which fixes a probe (4), and the speaker (2) is disposed on the circuit substrate (100). The circuit substrate (100) is provided with an aperture region. As the speaker (2) is disposed on that region, a test sound wave is output to the moving section of the microstructure. The probe (4) detects a change in an electrical characteristic caused by the motion of the moving section according to the test sound wave, thereby inspecting the characteristic of the microstructure.
Public/Granted literature
- US20070069746A1 Probing card and inspection apparatus for microstructure Public/Granted day:2007-03-29
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