发明授权
- 专利标题: Method for determining a correction value for light-emitting parts in exposure apparatus
- 专利标题(中): 确定曝光装置中发光部件的校正值的方法
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申请号: US10498061申请日: 2003-10-10
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公开(公告)号: US07349003B2公开(公告)日: 2008-03-25
- 发明人: Akira Shiota , Makoto Yasunaga , Sadao Masubuchi , Akinobu Iwako , Masafumi Yokoyama
- 申请人: Akira Shiota , Makoto Yasunaga , Sadao Masubuchi , Akinobu Iwako , Masafumi Yokoyama
- 申请人地址: JP Tokyo
- 专利权人: Citizen Holdings Co., Ltd.
- 当前专利权人: Citizen Holdings Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- 优先权: JP2002-297721 20021010; JP2002-297797 20021010; JP2002-297814 20021010; JP2002-297836 20021010
- 国际申请: PCT/JP03/13087 WO 20031010
- 国际公布: WO2004/033216 WO 20040422
- 主分类号: B41J2/435
- IPC分类号: B41J2/435 ; B41J15/14
摘要:
The invention is directed to the provision of an exposure apparatus that can determine a correction value for each individual light-emitting part by employing a method that detects the amount of light corresponding to one particular light-emitting part from composite light containing light rays from adjacent light-emitting parts, and also to the provision of a method for producing such an exposure apparatus. The production method according to the invention comprises the steps of lighting a plurality of light-emitting parts at the same time, detecting an output light-amount distribution across all of the plurality of light-emitting parts by making measurements using a line-like light-receiving device, detecting a peak position corresponding to each light-emitting part by using the output light-amount distribution; detecting the amount of light of each light-emitting part based on the peak position, and determining, based on the amount of light of each light-emitting part, the correction value for correcting nonuniformity in the amount of light of the light-emitting part.
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