Invention Grant
US07354623B2 Surface modification of a porous organic material through the use of a supercritical fluid
有权
通过使用超临界流体对多孔有机材料进行表面改性
- Patent Title: Surface modification of a porous organic material through the use of a supercritical fluid
- Patent Title (中): 通过使用超临界流体对多孔有机材料进行表面改性
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Application No.: US10852381Application Date: 2004-05-24
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Publication No.: US07354623B2Publication Date: 2008-04-08
- Inventor: Ching-Ya Wang , Ping Chuang , Sunny Wu , Yu-Liang Lin , Hung-Jung Tu , Mei-Sheng Zhou , Henry Lo
- Applicant: Ching-Ya Wang , Ping Chuang , Sunny Wu , Yu-Liang Lin , Hung-Jung Tu , Mei-Sheng Zhou , Henry Lo
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: B05D3/00
- IPC: B05D3/00 ; B05D5/00
Abstract:
An organic layer, such as a porous low-K dielectric in an IC, contains pores open at its surface. To close the pores, the organic layer is contacted by a supercritical fluid that is a solvent for the layer. After a small amount of the surface and the wall of the open pores is solvated, a phase transition of the solvated organic material is effected at the surface to cover it with a dense, smooth, non-porous film that seals the open pores.
Public/Granted literature
- US20050260402A1 Surface modification of a porous organic material through the use of a supercritical fluid Public/Granted day:2005-11-24
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