发明授权
US07354846B2 Submount substrate for mounting light emitting device and method of fabricating the same 有权
用于安装发光器件的底座基板及其制造方法

Submount substrate for mounting light emitting device and method of fabricating the same
摘要:
A submount substrate for mounting a light emitting device and a method of fabricating the same, wherein since a submount substrate for mouthing a light emitting device in which a Zener diode device is integrated can be fabricated by means of a silicon bulk micromachining process without using a diffusion mask, some steps of processes related to the diffusion mask can be eliminated to reduce the manufacturing costs, and wherein since a light emitting device can be flip-chip bonded directly to a submount substrate for a light emitting device in which a Zener diode device is integrated, a process of packaging the light emitting device and the voltage regulator device can be simplified.
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