发明授权
- 专利标题: Semiconductor device and fabrication method thereof
- 专利标题(中): 半导体器件及其制造方法
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申请号: US11226707申请日: 2005-09-13
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公开(公告)号: US07355279B2公开(公告)日: 2008-04-08
- 发明人: Chun-Chi Ke , Kook-Jui Tai , Chien-Ping Huang
- 申请人: Chun-Chi Ke , Kook-Jui Tai , Chien-Ping Huang
- 申请人地址: TW
- 专利权人: Siliconware Precision Industries Co., Ltd.
- 当前专利权人: Siliconware Precision Industries Co., Ltd.
- 当前专利权人地址: TW
- 代理机构: Edwards Angell Palmer & Dodge LLP
- 代理商 Peter F. Corless; Steven M. Jensen
- 优先权: TW94115340A 20050512
- 主分类号: H01L23/48
- IPC分类号: H01L23/48
摘要:
A semiconductor device and a fabrication method thereof are provided. A semiconductor substrate having a plurality of bonding pads is prepared, and a first passivation layer, a second passivation layer and a metallic layer are successively formed on the semiconductor substrate. A third passivation layer is further applied on the semiconductor substrate and has a plurality of openings for exposing a portion of the metallic layer, wherein each of the openings is shifted in position from a corresponding one of the bonding pads by a distance not exceeding a radius of the bonding pad. A plurality of solder bumps are bonded to the exposed portion of the metallic layer and have a larger contact area with the third passivation layer. This provides better buffer to reduce stress exerted on the solder bumps, thereby preventing problems of cracking and delamination as in the prior art.
公开/授权文献
- US20060258137A1 Semiconductor device and fabrication method thereof 公开/授权日:2006-11-16
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