发明授权
- 专利标题: Systems and methods of controlling micro-electromechanical devices
- 专利标题(中): 控制微机电装置的系统和方法
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申请号: US11564800申请日: 2006-11-29
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公开(公告)号: US07355782B2公开(公告)日: 2008-04-08
- 发明人: Mark W. Miles
- 申请人: Mark W. Miles
- 申请人地址: US CA San Francisco
- 专利权人: IDC, LLC
- 当前专利权人: IDC, LLC
- 当前专利权人地址: US CA San Francisco
- 代理机构: Knobbe Martens Olson & Bear LLP
- 主分类号: G02B26/00
- IPC分类号: G02B26/00 ; G09G3/34 ; H01L29/84 ; H03K17/16
摘要:
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.
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