Invention Grant
US07357256B2 Wafer pod with working sheet holder 有权
具有工作板支架的晶片盒

Wafer pod with working sheet holder
Abstract:
A wafer pod. The wafer pod comprises a main body, a working sheet holder disposed on the main body, and a lock disposed between the working sheet holder and the main body. The working sheet holder is fixed to the main body by the lock to form an accommodating space.
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