发明授权
- 专利标题: CMOS image sensor and method for fabricating the same
- 专利标题(中): CMOS图像传感器及其制造方法
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申请号: US11022890申请日: 2004-12-28
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公开(公告)号: US07358108B2公开(公告)日: 2008-04-15
- 发明人: Chang Hun Han , Bum Sik Kim
- 申请人: Chang Hun Han , Bum Sik Kim
- 申请人地址: KR Seoul
- 专利权人: Dongbu Electronics Co., Ltd.
- 当前专利权人: Dongbu Electronics Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: Finnegan, Henderson, Farabow, Garrett, & Dunner, L.L.P.
- 优先权: KR10-2003-0101553 20031231
- 主分类号: H01L21/76
- IPC分类号: H01L21/76
摘要:
A CMOS image sensor and a method for fabricating the same are disclosed, in which the boundary between an active region and a field region is not damaged by ion implantation. The method for fabricating a CMOS image sensor includes forming a trench in a first conductive type semiconductor substrate, forming a first conductive type heavily doped impurity ion region in the semiconductor substrate at both sides of the trench, forming a device isolation film by interposing an insulating film between the trench and the device isolation, sequentially forming a gate insulating film and a gate electrode on the semiconductor substrate, and forming a second conductive type impurity ion region for a photodiode in the semiconductor substrate between the gate electrode and the device isolation film.
公开/授权文献
- US20050156213A1 CMOS image sensor and method for fabricating the same 公开/授权日:2005-07-21
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