Invention Grant
- Patent Title: CMOS image sensor and method for fabricating the same
- Patent Title (中): CMOS图像传感器及其制造方法
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Application No.: US11022890Application Date: 2004-12-28
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Publication No.: US07358108B2Publication Date: 2008-04-15
- Inventor: Chang Hun Han , Bum Sik Kim
- Applicant: Chang Hun Han , Bum Sik Kim
- Applicant Address: KR Seoul
- Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Finnegan, Henderson, Farabow, Garrett, & Dunner, L.L.P.
- Priority: KR10-2003-0101553 20031231
- Main IPC: H01L21/76
- IPC: H01L21/76

Abstract:
A CMOS image sensor and a method for fabricating the same are disclosed, in which the boundary between an active region and a field region is not damaged by ion implantation. The method for fabricating a CMOS image sensor includes forming a trench in a first conductive type semiconductor substrate, forming a first conductive type heavily doped impurity ion region in the semiconductor substrate at both sides of the trench, forming a device isolation film by interposing an insulating film between the trench and the device isolation, sequentially forming a gate insulating film and a gate electrode on the semiconductor substrate, and forming a second conductive type impurity ion region for a photodiode in the semiconductor substrate between the gate electrode and the device isolation film.
Public/Granted literature
- US20050156213A1 CMOS image sensor and method for fabricating the same Public/Granted day:2005-07-21
Information query
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