Invention Grant
US07358651B2 Apparatus and method for detecting a target environmental variable that employs film-bulk acoustic wave resonator oscillators
有权
用于检测使用膜 - 体声波谐振器振荡器的目标环境变量的装置和方法
- Patent Title: Apparatus and method for detecting a target environmental variable that employs film-bulk acoustic wave resonator oscillators
- Patent Title (中): 用于检测使用膜 - 体声波谐振器振荡器的目标环境变量的装置和方法
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Application No.: US11109108Application Date: 2005-04-18
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Publication No.: US07358651B2Publication Date: 2008-04-15
- Inventor: Richard C. Ruby , Graham M. Flower , John D. Larson, III , Mark A. Unkrich
- Applicant: Richard C. Ruby , Graham M. Flower , John D. Larson, III , Mark A. Unkrich
- Applicant Address: SG Singapore
- Assignee: Avago Technologies Wireless (Singapore) Pte. Ltd.
- Current Assignee: Avago Technologies Wireless (Singapore) Pte. Ltd.
- Current Assignee Address: SG Singapore
- Main IPC: H01L41/08
- IPC: H01L41/08
Abstract:
An apparatus and method for detecting a target environmental variable (TEV). A first film-bulk acoustic resonator (FBAR) oscillator that includes a first FBAR with a first response to the target environmental variable generates a first frequency. A second film-bulk acoustic resonator (FBAR) oscillator that includes a second FBAR with a second response to the target environmental variable generates a second frequency. A circuit that is coupled to the first FBAR oscillator and the second FBAR oscillator determines the target environmental variable (e.g., changes in the TEV) based on the first frequency and the second frequency.
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