Invention Grant
- Patent Title: Twin insulator charge storage device operation and its fabrication method
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Application No.: US11409333Application Date: 2006-04-21
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Publication No.: US07359250B2Publication Date: 2008-04-15
- Inventor: Seiki Ogura , Kimihiro Satoh , Tomoya Saito
- Applicant: Seiki Ogura , Kimihiro Satoh , Tomoya Saito
- Applicant Address: US OR Hillsboro
- Assignee: Halo LSI, Inc.
- Current Assignee: Halo LSI, Inc.
- Current Assignee Address: US OR Hillsboro
- Agency: Saile Ackerman LLC
- Agent Stephen B. Ackerman; Rosemary L.S. Pike
- Main IPC: G11C11/34
- IPC: G11C11/34

Abstract:
The invention proposes am improved twin MONOS memory device and its fabrication. The ONO layer is self-aligned to the control gate horizontally. The vertical insulator between the control gate and the word gate does not include a nitride layer. This prevents the problem of electron trapping. The device can be fabricated to pull the electrons out through either the top or the bottom oxide layer of the ONO insulator. The device also incorporates a raised memory bit diffusion between the control gates to reduce bit resistance. The twin MONOS memory array can be embedded into a standard CMOS circuit by the process of the present invention.
Public/Granted literature
- US20060198200A1 Twin insulator charge storage device operation and its fabrication method Public/Granted day:2006-09-07
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