发明授权
- 专利标题: Optical measurement instrument and optical measurement method
- 专利标题(中): 光学测量仪器和光学测量方法
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申请号: US11378448申请日: 2006-03-20
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公开(公告)号: US07359825B2公开(公告)日: 2008-04-15
- 发明人: Atsushi Maki , Yuuichi Yamashita , Tsuyoshi Yamamoto , Hideaki Koizumi
- 申请人: Atsushi Maki , Yuuichi Yamashita , Tsuyoshi Yamamoto , Hideaki Koizumi
- 申请人地址: JP Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Mattingly, Stanger, Malur & Brundidge, P.C.
- 优先权: JP10-134649 19980428
- 主分类号: G01C17/00
- IPC分类号: G01C17/00
摘要:
In order to provide an optical measurement system and an optical measurement method which is suitable for optically measuring a body to be inspected and easily obtaining an image of a desired item based on information obtained by the measurement, an optical measurement method including an initial display process for selectively instructing any one of selection of optical measurement, analysis of said optical measurement result and completion of a program; a process for inputting items of condition including a measurement mode; a process for displaying a light irradiation position and a light detection position and a state expressing measurement position relationship together with said mode; a process for instructing to form a file for storing said optical measurement result; a process for instructing a measurement condition to detect light signals from the inside of a body to be inspected which is irradiated by a multi-wavelength multi-channel; and a process for displaying said signals for each channel detected according to said instructed result.
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