发明授权
- 专利标题: Device for electrostatic discharge protection and method of manufacturing the same
- 专利标题(中): 静电放电保护装置及其制造方法
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申请号: US11426037申请日: 2006-06-23
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公开(公告)号: US07361957B2公开(公告)日: 2008-04-22
- 发明人: Kil Ho Kim , Yong Icc Jung
- 申请人: Kil Ho Kim , Yong Icc Jung
- 申请人地址: KR Cheongju-si
- 专利权人: Magnachip Semiconductor, Ltd.
- 当前专利权人: Magnachip Semiconductor, Ltd.
- 当前专利权人地址: KR Cheongju-si
- 代理机构: Marshall, Gerstein & Borun LLP
- 优先权: KR2004-18063 20040317
- 主分类号: H01L23/62
- IPC分类号: H01L23/62 ; H01L29/72 ; H01L29/74 ; H01L31/111 ; H01L29/73
摘要:
The present invention relates to a device for electrostatic discharge protection (ESD). According to an embodiment of the present invention, a device for electrostatic discharge protection includes a semiconductor substrate, a plurality of field oxide films formed in predetermined regions on the semiconductor substrate, a gate formed in a predetermined region on the semiconductor substrate between the field oxide films, a well pick-up region formed in a predetermined region on the semiconductor substrate between the field oxide films, a source formed in a predetermined region on the semiconductor substrate between the field oxide film and the gate, a drain drift region formed in a predetermined region on the semiconductor substrate between the gate and the field oxide film, a drain active region of a concentration higher than that of the drain drift region, the drain active region being formed in the drain drift region, and an oxide film formed on the semiconductor substrate on a boundary of the drain drift region and the drain active region. Accordingly, the current concentrated on the surface of the device can be uniformly distributed over the entire device.
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