发明授权
- 专利标题: Tiltable-body apparatus, and method of fabricating the same
- 专利标题(中): 可倾倒体装置及其制造方法
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申请号: US11717022申请日: 2007-03-13
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公开(公告)号: US07362488B2公开(公告)日: 2008-04-22
- 发明人: Susumu Yasuda , Hidemasa Mizutani , Takayuki Yagi , Yasuhiro Shimada , Futoshi Hirose , Takahisa Kato
- 申请人: Susumu Yasuda , Hidemasa Mizutani , Takayuki Yagi , Yasuhiro Shimada , Futoshi Hirose , Takahisa Kato
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2001/047295 20010222; JP2001/047296 20010222; JP2001/047297 20010222; JP2001/278956 20010914; JP2001/279383 20010914; JP2001/301663 20010928
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; G09G5/00 ; F16M13/00 ; B44C1/22 ; C25F3/00 ; H01L21/302
摘要:
The tiltable-body apparatus including a frame member, a tiltable body, and a pair of torsion springs having a twisting longitudinal axis. The torsion springs are disposed along the twisting longitudinal axis opposingly with the tiltable body being interposed, support the tiltable body flexibly and rotatably about the twisting longitudinal axis relative to the frame member, and include a plurality of planar portions, compliant directions of which intersect each other when viewed along a direction of the twisting longitudinal axis. A center of gravity of the tiltable body is positioned on the twisting longitudinal axis of the torsion springs.
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