发明授权
US07366213B2 MOPA excimer or molecular fluorine laser system with improved synchronization
有权
MOPA准分子或分子氟激光系统具有改进的同步性
- 专利标题: MOPA excimer or molecular fluorine laser system with improved synchronization
- 专利标题(中): MOPA准分子或分子氟激光系统具有改进的同步性
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申请号: US10847071申请日: 2004-05-17
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公开(公告)号: US07366213B2公开(公告)日: 2008-04-29
- 发明人: Sergei V. Govorkov , Andriy N. Knysh , Alexander O. Wiessner
- 申请人: Sergei V. Govorkov , Andriy N. Knysh , Alexander O. Wiessner
- 申请人地址: DE Goettingen
- 专利权人: Lambda Physik AG
- 当前专利权人: Lambda Physik AG
- 当前专利权人地址: DE Goettingen
- 代理机构: Stallman & Pollock, LLP
- 主分类号: H01S3/00
- IPC分类号: H01S3/00
摘要:
The relative timing delay between channels of a discharge circuit can be adjusted through application of appropriate control voltages. A control voltage of relatively long duration and relatively small voltage, with respect to a common system pulse, can be applied to any channel in order to adjust the relative timing delay. This control voltage can be, for example, a magnetization pre-pulse voltage applied to an indictor for a channel in order to adjust a hold-off time. A synchronization control unit and feedback loop can be used to monitor the timing, such that the syncronization control unit can apply a control voltage when a delay change exceeds a timing adjustment threshold value, and can apply a pre-ionization voltage when the delay change is less than the adjustment threshold value. Using both a control voltage and a pre-ionization voltage provides for both coarse and fine adjustment of the delay.
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