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1.发明授权Master oscillator/power amplifier excimer laser system with pulse energy and pointing control 有权具有脉冲能量和指向控制的主振荡器/功率放大器准分子激光系统公开(公告)号：US07158553B2
公开(公告)日：2007-01-02
申请号：US10776404
申请日：2004-02-11
IPC分类号： H01S3/22
CPC分类号： H01S3/2366 , H01S3/10 , H01S3/225 , H01S3/2333
摘要： Pulse parameters of a gas discharge laser system can be optimized and controlled for precision applications such as microlithography. Important laser pulse parameters typically vary in the beginning of a pulse burst, and the directionality of the output beam typically varies throughout the burst. In order to improve the performance of the laser system, the variation at the beginning of a pulse burst can be eliminated by extending the pulse pattern and shuttering the output during periods of significant parameter variation. A fast shutter such as an acousto-optical modulator can be used to prevent output during the burst transition processes. Elements such as acousto-optical cells also can be used in combination with a fast position sensor to steer the direction of the output beam, in order to adjust for variations in the direction of the beam between pulses in a burst.
摘要翻译： 可以优化和控制气体放电激光系统的脉冲参数，用于精密应用，如微光刻。 重要的激光脉冲参数通常在脉冲脉冲串的开始时变化，并且输出光束的方向性通常在整个脉冲串中变化。 为了提高激光系统的性能，可以通过在显着的参数变化期间延长脉冲模式并对输出进行快门来消除脉冲脉冲串开始时的变化。 诸如声光调制器之类的快门可用于在突发转换过程期间防止输出。 诸如声光单元的元件也可以与快速位置传感器组合使用以控制输出光束的方向，以便调整在脉冲串中的脉冲之间的波束方向上的变化。
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公开(公告)号：US07245420B2
公开(公告)日：2007-07-17
申请号：US11654780
申请日：2007-01-18
申请人： Sergei V. Govorkov , Gongxue Hua , Timur Misuryaev , Alexander O. Wiessner , Thomas Schmidt , Rainer Paetzel
发明人： Sergei V. Govorkov , Gongxue Hua , Timur Misuryaev , Alexander O. Wiessner , Thomas Schmidt , Rainer Paetzel
CPC分类号： G03F7/7055 , H01S3/0057 , H01S3/0835 , H01S3/235
摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.
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3.发明授权MOPA excimer or molecular fluorine laser system with improved synchronization 有权MOPA准分子或分子氟激光系统具有改进的同步性公开(公告)号：US07366213B2
公开(公告)日：2008-04-29
申请号：US10847071
申请日：2004-05-17
IPC分类号： H01S3/00
CPC分类号： H01S3/0977 , H01S3/09702 , H01S3/225 , H01S3/2253 , H01S3/2308
摘要： The relative timing delay between channels of a discharge circuit can be adjusted through application of appropriate control voltages. A control voltage of relatively long duration and relatively small voltage, with respect to a common system pulse, can be applied to any channel in order to adjust the relative timing delay. This control voltage can be, for example, a magnetization pre-pulse voltage applied to an indictor for a channel in order to adjust a hold-off time. A synchronization control unit and feedback loop can be used to monitor the timing, such that the syncronization control unit can apply a control voltage when a delay change exceeds a timing adjustment threshold value, and can apply a pre-ionization voltage when the delay change is less than the adjustment threshold value. Using both a control voltage and a pre-ionization voltage provides for both coarse and fine adjustment of the delay.
摘要翻译： 放电电路通道之间的相对定时延时可以通过适当的控制电压进行调节。 相对于公共系统脉冲，相对长的持续时间和相对较小的电压的控制电压可以应用于任何通道，以便调整相对定时延迟。 该控制电压可以是例如施加到通道的指示器的磁化预脉冲电压，以调整延迟时间。 可以使用同步控制单元和反馈环来监视定时，使得当延迟变化超过定时调整阈值时，同步控制单元可以施加控制电压，并且当延迟变化为 小于调整阈值。 使用控制电压和预电离电压既可以对延迟进行粗调和微调。
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4.发明授权Apparatus for combining beams from repetitively pulsed lasers along a common path 失效用于组合沿着公共路径的重复脉冲激光束的光束的装置公开(公告)号：US07336691B2
公开(公告)日：2008-02-26
申请号：US11386637
申请日：2006-03-22
IPC分类号： H01S3/08
CPC分类号： H01S3/005 , G02B26/0816
摘要： Two pulse sequences are delivered by two lasers. A rotating segmented mirror having one or more reflective areas and one or more transmissive areas is rotated synchronously with the delivery of the pulse sequences to transmit pulses from one sequence, and to reflect pulses from the other sequence at intervals.
摘要翻译： 两个脉冲序列由两个激光器传送。 具有一个或多个反射区域和一个或多个透射区域的旋转分段反射镜与脉冲序列的传送同步地旋转以从一个序列发送脉冲，并且以间隔反射来自另一个序列的脉冲。
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公开(公告)号：US07184204B2
公开(公告)日：2007-02-27
申请号：US10881103
申请日：2004-06-30
申请人： Sergei V. Govorkov , Gongxue Hua , Timur Misuryaev , Alexander O. Wiessner , Thomas Schmidt , Rainer Paetzel
发明人： Sergei V. Govorkov , Gongxue Hua , Timur Misuryaev , Alexander O. Wiessner , Thomas Schmidt , Rainer Paetzel
CPC分类号： G03F7/7055 , H01S3/0057 , H01S3/0835 , H01S3/235
摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.
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