发明授权
US07368045B2 Gate stack engineering by electrochemical processing utilizing through-gate-dielectric current flow
有权
通过电化学处理利用栅极 - 电介质电流流动的栅堆叠工程
- 专利标题: Gate stack engineering by electrochemical processing utilizing through-gate-dielectric current flow
- 专利标题(中): 通过电化学处理利用栅极 - 电介质电流流动的栅堆叠工程
-
申请号: US11050790申请日: 2005-01-27
-
公开(公告)号: US07368045B2公开(公告)日: 2008-05-06
- 发明人: Philippe M. Vereecken , Veeraraghavan S. Basker , Cyril Cabral, Jr. , Emanuel I. Cooper , Hariklia Deligianni , Martin M. Frank , Rajarao Jammy , Vamsi Krishna Paruchuri , Katherine L. Saenger , Xiaoyan Shao
- 申请人: Philippe M. Vereecken , Veeraraghavan S. Basker , Cyril Cabral, Jr. , Emanuel I. Cooper , Hariklia Deligianni , Martin M. Frank , Rajarao Jammy , Vamsi Krishna Paruchuri , Katherine L. Saenger , Xiaoyan Shao
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Connolly Bove Lodge and Hutz
- 代理商 Robert M. Trepp
- 主分类号: C25D5/02
- IPC分类号: C25D5/02 ; C25D11/04
摘要:
A method is provided for electroplating a gate metal or other conducting or semiconducting material directly on a dielectric such as a gate dielectric. The method involves selecting a substrate, dielectric layer, and electrolyte solution or melt, wherein the combination of the substrate, dielectric layer, and electrolyte solution or melt allow an electrochemical current to be passed from the substrate through the dielectric layer into the electrolyte solution or melt. Methods are also provided for electrochemical modification of dielectrics utilizing through-dielectric current flow.
公开/授权文献
信息查询