发明授权
US07368045B2 Gate stack engineering by electrochemical processing utilizing through-gate-dielectric current flow 有权
通过电化学处理利用栅极 - 电介质电流流动的栅堆叠工程

Gate stack engineering by electrochemical processing utilizing through-gate-dielectric current flow
摘要:
A method is provided for electroplating a gate metal or other conducting or semiconducting material directly on a dielectric such as a gate dielectric. The method involves selecting a substrate, dielectric layer, and electrolyte solution or melt, wherein the combination of the substrate, dielectric layer, and electrolyte solution or melt allow an electrochemical current to be passed from the substrate through the dielectric layer into the electrolyte solution or melt. Methods are also provided for electrochemical modification of dielectrics utilizing through-dielectric current flow.
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