发明授权
- 专利标题： Piezoelectric thin-film resonator and filter having the same
- 专利标题（中）： 压电薄膜谐振器和具有相同功能的滤波器
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申请号： US11413104申请日： 2006-04-28
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公开(公告)号： US07368859B2公开(公告)日： 2008-05-06
- 发明人: Tsuyoshi Yokoyama , Tokihiro Nishihara , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
- 申请人： Tsuyoshi Yokoyama , Tokihiro Nishihara , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
- 申请人地址： JP Yokohama JP Kawasaki
- 专利权人： Fujitsu Media Devices Limited,Fujitsu Limited
- 当前专利权人： Fujitsu Media Devices Limited,Fujitsu Limited
- 当前专利权人地址： JP Yokohama JP Kawasaki
- 代理机构： Arent Fox LLP
- 优先权： JP2005-130989 20050428
- 主分类号： H01L41/047
- IPC分类号： H01L41/047
摘要：
A piezoelectric thin-film resonator includes a lower electrode provided on a substrate, a piezoelectric thin film provided on the lower electrode, and an upper electrode provided on the piezoelectric thin film. A membrane region is defined by a region where the upper electrode and the lower electrode overlap each other to sandwich the piezoelectric thin film therebetween and has an elliptical shape, and the lower electrode is also provided at an outer side of the membrane region in a region in which neither an extraction electrode of the upper electrode nor an extraction electrode of the lower electrode is provided.
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