Invention Grant
US07375873B2 Method of repairing micromirrors in spatial light modulators 有权
在空间光调制器中修复微镜的方法

Method of repairing micromirrors in spatial light modulators
Abstract:
Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.
Public/Granted literature
Information query
Patent Agency Ranking
0/0