Invention Grant
US07378667B2 Particle-optical appliance provided with aberration-correcting means 有权
具有像差校正装置的粒子装置

  • Patent Title: Particle-optical appliance provided with aberration-correcting means
  • Patent Title (中): 具有像差校正装置的粒子装置
  • Application No.: US11397480
    Application Date: 2006-04-04
  • Publication No.: US07378667B2
    Publication Date: 2008-05-27
  • Inventor: Alexander Henstra
  • Applicant: Alexander Henstra
  • Applicant Address: US OR Hillsboro
  • Assignee: FEI Company
  • Current Assignee: FEI Company
  • Current Assignee Address: US OR Hillsboro
  • Agency: Scheinberg & Griner, LLP
  • Agent Michael O. Scheinberg
  • Priority: NL1028699 20050405; NL1029066 20050518
  • Main IPC: G21K1/00
  • IPC: G21K1/00
Particle-optical appliance provided with aberration-correcting means
Abstract:
Quadrupole-octupole aberration corrector for application in a TEM, STEM or SEM. A known corrector for correcting third-order and fifth-order aberrations of the objective is embodied with eight quadrupoles and three octupoles. The corrector according to the invention has at least the same aberration-correcting power, but, according to the invention, is embodied with six quadrupoles and three octupoles. By adding octupoles with a relatively weak excitation to a portion of the quadrupoles, correction of the anisotropic coma of the objective lens is also attained. By embodying all quadrupoles, or a portion thereof, to be electromagnetic, chromatic aberrations can also be corrected for.
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