Invention Grant
- Patent Title: Particle-optical appliance provided with aberration-correcting means
- Patent Title (中): 具有像差校正装置的粒子装置
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Application No.: US11397480Application Date: 2006-04-04
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Publication No.: US07378667B2Publication Date: 2008-05-27
- Inventor: Alexander Henstra
- Applicant: Alexander Henstra
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Griner, LLP
- Agent Michael O. Scheinberg
- Priority: NL1028699 20050405; NL1029066 20050518
- Main IPC: G21K1/00
- IPC: G21K1/00

Abstract:
Quadrupole-octupole aberration corrector for application in a TEM, STEM or SEM. A known corrector for correcting third-order and fifth-order aberrations of the objective is embodied with eight quadrupoles and three octupoles. The corrector according to the invention has at least the same aberration-correcting power, but, according to the invention, is embodied with six quadrupoles and three octupoles. By adding octupoles with a relatively weak excitation to a portion of the quadrupoles, correction of the anisotropic coma of the objective lens is also attained. By embodying all quadrupoles, or a portion thereof, to be electromagnetic, chromatic aberrations can also be corrected for.
Public/Granted literature
- US20060219935A1 Particle-optical appliance provided with aberration-correcting means Public/Granted day:2006-10-05
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