发明授权
US07379766B2 CMOS-process compatible high-DC surface coating for capacitive detection and stimulation of biological tissues
有权
CMOS工艺兼容的高直流表面涂层，用于电容检测和刺激生物组织
- 专利标题： CMOS-process compatible high-DC surface coating for capacitive detection and stimulation of biological tissues
- 专利标题（中）： CMOS工艺兼容的高直流表面涂层，用于电容检测和刺激生物组织
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申请号： US10931482申请日： 2004-09-01
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公开(公告)号： US07379766B2公开(公告)日： 2008-05-27
- 发明人: Reinhard Gabl , Tamara Birkenmaier , Bjorn-Oliver Eversmann , Peter Fromherz , Martin Jenkner , Matthias Schreiter , Roland Thewes , Wolfram Wersing
- 申请人： Reinhard Gabl , Tamara Birkenmaier , Bjorn-Oliver Eversmann , Peter Fromherz , Martin Jenkner , Matthias Schreiter , Roland Thewes , Wolfram Wersing
- 申请人地址： DE Neubiberg
- 专利权人： Infineon Technologies AG
- 当前专利权人： Infineon Technologies AG
- 当前专利权人地址： DE Neubiberg
- 代理机构： Dickstein Shapiro LLP
- 优先权： DE10209075 20020301
- 主分类号： A61B5/04
- IPC分类号： A61B5/04 ; H01L21/16
摘要：
Biochip for capacitive stimulation and/or detection of biological tissues. The biochip has a carrier structure, at least one stimulation and/or sensor device, which is arranged in or at the carrier structure, and at least one dielectric layer, one layer area of which is arranged at the stimulation and/or sensor device and the opposite layer area of which forms a stimulation and/or sensor area for capacitive simulation and/or detection of biological tissues, wherein the dielectric layer comprises TiO2.
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