Invention Grant
US07382662B2 Twin insulator charge storage device operation and its fabrication method
有权
双绝缘子电荷存储装置的操作及其制作方法
- Patent Title: Twin insulator charge storage device operation and its fabrication method
- Patent Title (中): 双绝缘子电荷存储装置的操作及其制作方法
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Application No.: US11409247Application Date: 2006-04-21
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Publication No.: US07382662B2Publication Date: 2008-06-03
- Inventor: Seiki Ogura , Kimihiro Satoh , Tomoya Saito
- Applicant: Seiki Ogura , Kimihiro Satoh , Tomoya Saito
- Applicant Address: US OR Hillsboro
- Assignee: Halo LSI, Inc.
- Current Assignee: Halo LSI, Inc.
- Current Assignee Address: US OR Hillsboro
- Agency: Saile Ackerman LLC
- Agent Stephen B. Ackerman; Rosemary L. S. Pike
- Main IPC: G11C11/34
- IPC: G11C11/34 ; H01L23/58

Abstract:
The invention proposes am improved twin MONOS memory device and its fabrication. The ONO layer is self-aligned to the control gate horizontally. The vertical insulator between the control gate and the word gate does not include a nitride layer. This prevents the problem of electron trapping. The device can be fabricated to pull the electrons out through either the top or the bottom oxide layer of the ONO insulator. The device also incorporates a raised memory bit diffusion between the control gates to reduce bit resistance. The twin MONOS memory array can be embedded into a standard CMOS circuit by the process of the present invention.
Public/Granted literature
- US20060203562A1 Twin insulator charge storage device operation and its fabrication method Public/Granted day:2006-09-14
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