发明授权
- 专利标题: Package structure of sensor and flow sensor having the same
- 专利标题(中): 传感器和流量传感器的封装结构相同
-
申请号: US11703581申请日: 2007-02-07
-
公开(公告)号: US07383726B2公开(公告)日: 2008-06-10
- 发明人: Shinichi Ike , Nobuhiko Zushi , Takeshi Nishi
- 申请人: Shinichi Ike , Nobuhiko Zushi , Takeshi Nishi
- 申请人地址: JP
- 专利权人: Yamatake Corporation
- 当前专利权人: Yamatake Corporation
- 当前专利权人地址: JP
- 代理机构: Cantor Colburn LLP
- 优先权: JP2006-030312 20060207
- 主分类号: G01F1/68
- IPC分类号: G01F1/68
摘要:
The package structure may includes: a sensor chip having a detecting device formed on a front surface of a substrate; through electrodes that are arranged at predetermined positions of the substrate around the detecting device, electrically insulated at circumferences thereof, pierce the substrate from the front surface to a rear surface, are connected with lead patterns of the detecting device on the front surface side, and connected with signal fetching means for the outside on the rear surface side; a flow path body on which the sensor chip is mounted and which has a flow path (a conduction path) for a fluid being formed on a surface facing the detecting device and sealing means.
公开/授权文献
信息查询